conference paper not in proceedings
Time-resolved SiH4 density inside a chemical vapor deposition system: gas flow dynamics and glow discharge control
2010
Type
conference paper not in proceedings
Author(s)
Strahm, Benjamin
Feltrin, Andrea
Date Issued
2010
Note
IMT-NE Number: 565
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
San Francisco, USA | Apr. 5–9 | |
Available on Infoscience
June 1, 2010
Use this identifier to reference this record