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research article

Lithographically defined polymer tips for quartz tuning fork based scanning force microscopes

Akiyama, T.  
•
Staufer, U.
•
de Rooij, N. F.  
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2001
Microelectronic Engineering
  • Details
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Type
research article
DOI
10.1016/S0167-9317(01)00482-8
Author(s)
Akiyama, T.  
Staufer, U.
de Rooij, N. F.  
Howald, L.
Scandella, L.
Date Issued

2001

Published in
Microelectronic Engineering
Volume

57-58

Start page

769

End page

773

Note

249

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/38932
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