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  4. Links between hydrogen bonding, residual stress, structural properties and metastability in hydrogenated nanostructured silicon thin films
 
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research article

Links between hydrogen bonding, residual stress, structural properties and metastability in hydrogenated nanostructured silicon thin films

Vignoli, S.
•
Butte, R.  
•
Meaudre, R.
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2003
Journal of Physics: Condensed Matter

We present a systematic study of the local hydrogen bonding in hydrogenated polymorphous silicon thin films (pm-Si:H), a heterogeneous material deposited on the edge of crystallinity, by means of Fourier transform infrared spectroscopy. A vibrational mode at similar to2030 cm(-1) is reported and attributed to hydrogen atoms bonded in hydrogen-rich regions present at the interface between ordered regions and the amorphous matrix. This assignment is found to be in good agreement with previous spectroscopic ellipsometry and Raman spectroscopy studies. Combined with stress measurements we draw a picture of the nanostructure of pm-Si:H films, namely a two-domain material exhibiting: (i) large fluctuations of H content, (ii) a high mass density and (iii) the coexistence of highly strained crystalline phases with a relaxed amorphous matrix. Unexplained optoelectronic properties and metastability phenomena can also be accounted for by this picture.

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Type
research article
DOI
10.1088/0953-8984/15/43/004
Author(s)
Vignoli, S.
•
Butte, R.  
•
Meaudre, R.
•
Meaudre, M.
•
Brenier, R.
Date Issued

2003

Published in
Journal of Physics: Condensed Matter
Volume

15

Issue

43

Start page

7185

End page

7200

Subjects

A-SI-H

•

CHEMICAL-VAPOR-DEPOSITION

•

CAPTURE CROSS-SECTIONS

•

DENSITY-OF-STATES

•

AMORPHOUS-SILICON

•

POLYMORPHOUS SILICON

•

MICROCRYSTALLINE SILICON

•

INFRARED-SPECTROSCOPY

•

VIBRATIONAL-SPECTRA

•

LIGHT-SOAKING

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
LASPE  
Available on Infoscience
October 5, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/55007
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