An approach that models the fabrication and enables the characterization of randomly self-textured silicon thin film solar cells is developed and are compared to experimental results. The optical and electrical properties of the solar cells depend on the morphology of the randomly self-textured substrate and the formation of the individual layers of the solar cell. The influence of the interface morphology on the optical and electrical properties is investigated by 3D morphological algorithms. The calculated interface morphologies are compared to measured surfaces, and used as input parameters to simulate the optical wave propagation and to determine the formation of regions with reduced order (cracks) in the solar cells. The calculations are compared to experimentally realized 1.1 mu m thick microcrystalline silicon solar cells prepared on randomly self-textured substrates with high energy conversion efficiency of up to 9.4%. Guidelines for the optical and electronic optimization are provided.