Triangular (111) and square-shaped (100) Pb(Zr,Ti)O-3 single crystallites with lateral dimensions down to 50 nm and thickness of 20 nm have been grown using lithography-modulated self-assembly in an in situ sputter process. Epitaxial (111)-oriented Pt on a SrTiO3 single crystal served as the substrate. An epitaxial 2 nm thick rutile TiO2 film was grown and patterned into 100-200 nm wide attachment sites by electron beam lithography. The perovskite nucleation density was 60 times higher on TiO2 seeds than on bare Pt(111). (C) 2004 American Institute of Physics.