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research article

Lithography-modulated self-assembly of small ferroelectric Pb(Zr,Ti)O-3 single crystals

Buhlmann, S.
•
Muralt, P.  
•
Von Allmen, S.
2004
Applied Physics Letters

Triangular (111) and square-shaped (100) Pb(Zr,Ti)O-3 single crystallites with lateral dimensions down to 50 nm and thickness of 20 nm have been grown using lithography-modulated self-assembly in an in situ sputter process. Epitaxial (111)-oriented Pt on a SrTiO3 single crystal served as the substrate. An epitaxial 2 nm thick rutile TiO2 film was grown and patterned into 100-200 nm wide attachment sites by electron beam lithography. The perovskite nucleation density was 60 times higher on TiO2 seeds than on bare Pt(111). (C) 2004 American Institute of Physics.

  • Details
  • Metrics
Type
research article
DOI
10.1063/1.1690873
Web of Science ID

WOS:000220586800048

Author(s)
Buhlmann, S.
•
Muralt, P.  
•
Von Allmen, S.
Date Issued

2004

Published in
Applied Physics Letters
Volume

84

Issue

14

Start page

2614

End page

2616

Subjects

thin-films

•

seed-layers

•

size

•

nucleation

•

texture

•

growth

•

domain

•

vapor

Note

Buhlmann, S Swiss Fed Inst Technol, EPFL, Ceram Lab, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, EPFL, Ceram Lab, CH-1015 Lausanne, Switzerland

808RS

Cited References Count:19

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233526
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