Etching of sub-micrometer structures through Stencil

conference paper

Etching of sub-micrometer structures through Stencil

•

Vazquez-Mena, O.

•

van den Boogaart, M. A. F.

2008

Microelectronic Engineering Journal

33rd International Conference on Micro- and Nano Engineering 2007 (MNE 2007), 23-26 Sept, 2007, Copenhagen, Denmark

Name

Villanueva_2007_MNE.pdf

Access type

openaccess

Size

544.36 KB

Format

Adobe PDF

Checksum (MD5)

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