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conference paper

Silicon nanowires reliability and robustness investigation using AFM-based techniques

Bieniek, T.
•
Janczyk, G.
•
Janus, P.
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2013
Proceedings of SPIE - The International Society for Optical Engineering

Silicon nanowires (SiNWs) have undergone intensive research for their application in novel integrated systems such as field effect transistor (FET) biosensors and mass sensing resonators profiting from large surface-to-volume ratios (nano dimensions). Such devices have been shown to have the potential for outstanding performances in terms of high sensitivity, selectivity through surface modification and unprecedented structural characteristics. This paper presents the results of mechanical characterization done for various types of suspended SiNWs arranged in a 3D array. The characterization has been performed using techniques based on atomic force microscopy (AFM). This investigation is a necessary prerequisite for the reliable and robust design of any biosensing system. This paper also describes the applied investigation methodology and reports measurement results aggregated during series of AFM-based tests. © 2013 SPIE.

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Type
conference paper
DOI
10.1117/12.2031229
Author(s)
Bieniek, T.
•
Janczyk, G.
•
Janus, P.
•
Grabiec, P.
•
Nieprzecki, M.
•
Wielgoszewski, G.
•
Moczala, M.
•
Gotszalk, T.
•
Buitrago, E.
•
Badia, M. F.-B.
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Date Issued

2013

Journal
Proceedings of SPIE - The International Society for Optical Engineering
Volume

8902

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
NANOLAB  
Available on Infoscience
January 21, 2014
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/100089
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