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  4. Digital Holographic Microscopy (DHM): Fast and robust 3D measurements with interferometric resolution for industrial inspection
 
conference paper

Digital Holographic Microscopy (DHM): Fast and robust 3D measurements with interferometric resolution for industrial inspection

Emery, Y.
•
Cuche, E.  
•
Marquet, F.
Show more
Osten, Wolfgang
2006
Fringe 2005
The 5th International Workshop on Automatic Processing of Finge Patterns

The use of numerical procedure at a level never reach so far in optical imaging enables DHM to overcome two cumbersome alignment procedures of interferometric microscopes: (1) fine focus of the sample, and (2) sample tilt adjustment. In addition the technology enables to retrieve the full information from a single hologram acquisition. This enables very short acquisition time, smaller than typical propagation frequencies of ambient vibrations. These instruments can be operated without vibration insulation tables. Combined with the simplicity of the opto-mechanical design and the absence of moving parts, DHM are new measurement systems with a nanometer scale resolution ready to take place in production lines.

DHM can be used to characterized shapes and surface roughness of a large variety of samples and their use for industrial inspection should definitely spread during the next years

  • Details
  • Metrics
Type
conference paper
DOI
10.1007/3-540-29303-5_90
Author(s)
Emery, Y.
Cuche, E.  
Marquet, F.
Bourquin, S.
Marquet, P.
Kuhn, J.
Aspert, N.
Botkin, M.
Depeursinge, C.  
Editors
Osten, Wolfgang
Date Issued

2006

Publisher

Springer-Verlag

Publisher place

Berlin

Published in
Fringe 2005
ISBN of the book

3-540-26037-4

Start page

667

End page

671

Subjects

[MVD]

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LOA  
Event nameEvent placeEvent date
The 5th International Workshop on Automatic Processing of Finge Patterns

Stuttgart

November 28-2, 2005

Available on Infoscience
July 20, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/41615
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