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A Generalized EKV Charge-based MOSFET Model Including Oxide and Interface Traps

Zhang, Chunmin  
•
Jazaeri, Farzan  
•
Borghello, Giulio
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January 7, 2021
Solid-State Electronics

This paper presents a generalized charge-based EKV MOSFET model that includes the effects of trapped charges in the bulk oxide and at the silicon/oxide interface. It is shown that in the presence of oxide- and interface-trapped charges, the mobile charge density can still be linearized but with respect to both the surface potential and the channel voltage. This enables us to derive closed-form expressions for the mobile charge density and the drain current. These simple formulations demonstrate the effects of charge trapping on MOSFET characteristics and crucial device parameters. The proposed charge-based analytical model, including the effect of velocity saturation, is successfully validated through measurements performed on devices from a 28-nm bulk CMOS technology. Ultrahigh total ionizing doses up to 1 Grad(SiO2) are applied to generate oxide-trapped charges and activate the passivated interface traps. Despite a small number of parameters, the model is capable of accurately capturing the measurement results over a wide range of device operation from weak to strong inversion. Explicit expressions of device parameters also allow for the extraction of the oxide- and interface-trapped charge density.

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1-s2.0-S0038110120304184-main.pdf

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http://purl.org/coar/version/c_970fb48d4fbd8a85

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openaccess

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CC BY-NC-ND

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1.83 MB

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d5bdc7aa0e5bf2588fa904be373211cf

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