conference paper
Processing influence on the reliability of platinum thin films for MEMS applications
2002
BioMEMS and Bionanotechnology
Type
conference paper
Author(s)
Date Issued
2002
Published in
BioMEMS and Bionanotechnology
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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