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January 1, 2022
Epitaxial growth of GeTe/Sb2Te3 superlattices
research article
In the quest for superlattices with engineered interfaces for disruptive applications such as neuromorphic computing, we present a dedicated study on the epitaxial growth of nominal GeTe/Sb2Te3 chalcogenide superlattices (CSL) on the Sb passivated Si(111) - (root 3 x root 3)R30 degrees - Sb surface. Intermixing at the GeTe and Sb2Te3 interface is assessed by X-Ray diffraction and reflectivity. A new growth procedure with element flux interruptions is proposed to engineer the degree of intermixing and the tailoring of the GeSbTe layers into Sb-rich compositions.
Type
research article
Web of Science ID
WOS:000705028600003
Author(s)
Date Issued
2022-01-01
Published in
Volume
137
Article Number
106244
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
January 31, 2022
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