Loading...
research article
Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude
We present an in-detail description of the design, simulation, fabrication, and packaging of a linear micromirror array specifically designed for temporal pulse shaping of ultrashort laser pulses. The innovative features of this device include a novel comb-drive actuator allowing both piston and tilt motion for phase- and amplitude-shaping, and an X-shaped laterally reinforced spring preventing lateral snap-in while providing high flexibility for both degrees of freedom. (C) 2011 American Institute of Physics. [doi:10.1063/1.3606440]
Type
research article
Web of Science ID
WOS:000293498400062
Author(s)
Weber, Stefan M.
•
Bonacina, Luigi
•
•
Kiselev, Denis
•
Extermann, Jerome
•
•
Lani, Sebastien
•
Nenadl, Ondrej
•
Wolf, Jean-Pierre
•
Date Issued
2011
Publisher
Published in
Volume
82
Article Number
075106
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
December 16, 2011
Use this identifier to reference this record