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research article
Microsystems Research and Development at IMT Neuchatel - Modelling and Performance of Polysilicon Comb Actuators
Linder, C.
•
Jaecklin, V. P.
Type
research article
Authors
Linder, C.
•
Jaecklin, V. P.
Publication date
1993
Published in
Volume
6
Issue
1
Start page
107
Note
83
Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record