conference paper
Silicon photonic MEMS phase shifter with mu s time constant built on a foundry platform
January 1, 2021
2021 Conference On Lasers And Electro-Optics (Cleo)
MEMS enable low power tuners in silicon photonics, but existing phase shifters lack in range, speed, and loss. We implement a 2 pi phase shifter with a 1.54 mu s time constant and 0.5 dB insertion loss in IMEC's iSiPP5OG platform.
Type
conference paper
Web of Science ID
WOS:000831479802308
Author(s)
Edinger, Pierre
Kristinsson, Kristofer
Errando-Herranz, Carlos
Verheyen, Peter
Bogaerts, Wim
Gylfason, Kristinn B.
Date Issued
2021-01-01
Publisher
Publisher place
New York
Published in
2021 Conference On Lasers And Electro-Optics (Cleo)
ISBN of the book
978-1-943580-91-0
Series title/Series vol.
Conference on Lasers and Electro-Optics
Start page
STu2Q.1
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
| Event name | Event place | Event date |
ELECTR NETWORK | May 09-14, 2021 | |
Available on Infoscience
September 12, 2022
Use this identifier to reference this record