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research article

Structural properties and recombination processes in hydrogenated polymorphous silicon

Meaudre, R.
•
Butte, R.  
•
Vignoli, S.
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2003
European Physical Journal-Applied Physics

When silicon thin films are deposited by plasma enhanced chemical vapor deposition in a plasma regime close to powder formation, a new type of material, consisting of an amorphous matrix in which silicon nanocrystallites are embedded is obtained. This material, named hydrogenated polymorphous silicon (pm-Si: H), exhibits enhanced transport properties with respect to state-of-the-art hydrogenated amorphous silicon (a-Si: H). In order to understand the origin of such improved properties, we investigated structural characterization of pm-Si:H films. High resolution transmission electron microscopy (HRTEM) micrograph, micro-Raman and infrared spectra of the films are presented. The crystallite sizes deduced from the Raman spectra are supported by the HRTEM measurements. The infrared stretching modes of pm-Si:H films present a band at similar to2030 cm(-1) attributed to hydrogen platelets. Two approaches are then given in order to explain the enhanced photoconductivity properties. The first one, qualitative, appeals to low density of states at the Fermi level N(E-F) and low capture cross-section of electrons sigma(c) due to the improved amorphous matrix. The second, more quantitative, suggests that recombination mainly occur at dangling bonds at the surface of the crystallites. Considering the dangling bond density at silicon surface passivated by hydrogen and the description of multiphonon carrier capture, both given in the literature, we derive N(E-F) and sigma(c) values in good agreement with experiments.

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Type
research article
DOI
10.1051/epjap:2003030
Author(s)
Meaudre, R.
•
Butte, R.  
•
Vignoli, S.
•
Meaudre, M.
•
Saviot, L.
•
Marty, O.
•
Cabarrocas, P. R. I.
Date Issued

2003

Published in
European Physical Journal-Applied Physics
Volume

22

Issue

3

Start page

171

End page

178

Subjects

A-SI-H

•

DENSITY-OF-STATES

•

MICROCRYSTALLINE SILICON

•

AMORPHOUS-SILICON

•

POROUS SILICON

•

ELECTRONIC-PROPERTIES

•

RAMAN-SPECTRA

•

THIN-FILMS

•

DEPOSITION

•

PHOTOLUMINESCENCE

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
LASPE  
Available on Infoscience
October 5, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/54998
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