conference paper
Micromachined Atomic Force Microprobe with Integrated Capacitive Read-Out
1992
MME'92 Micromechanics Europe Workshop
Type
conference paper
Author(s)
Date Issued
1992
Published in
MME'92 Micromechanics Europe Workshop
Start page
207
End page
210
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record