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conference paper
Micromachined Atomic Force Microprobe with Integrated Capacitive Read-Out
1992
MME'92 Micromechanics Europe Workshop
Type
conference paper
Authors
Publication date
1992
Published in
MME'92 Micromechanics Europe Workshop
Start page
207
End page
210
Peer reviewed
NON-REVIEWED
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record