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conference paper
MEMS tunable filter for telecom applications
2004
MEMS, MOEMS, and Micromachining
Type
conference paper
Author(s)
Overstolz, T.
•
Niederer, G.
•
•
Gale, M. T.
•
Herzig, H. P.
•
Obi, S.
•
Thiele, H.
•
Date Issued
2004
Journal
MEMS, MOEMS, and Micromachining
Series title/Series vol.
SPIE Proceedings; 5455
Start page
240
End page
251
Peer reviewed
NON-REVIEWED
Written at
OTHER
| Event name | Event place |
Strasbourg, France | |
Available on Infoscience
May 12, 2009
Use this identifier to reference this record