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conference paper

MEMS tunable filter for telecom applications

Overstolz, T.
•
Niederer, G.
•
Noell, W.  
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2004
MEMS, MOEMS, and Micromachining
Photonics Europe
  • Details
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Type
conference paper
DOI
10.1117/12.545581
Author(s)
Overstolz, T.
•
Niederer, G.
•
Noell, W.  
•
Gale, M. T.
•
Herzig, H. P.
•
Obi, S.
•
Thiele, H.
•
de Rooij, N. F.  
Date Issued

2004

Published in
MEMS, MOEMS, and Micromachining
Series title/Series vol.

SPIE Proceedings; 5455

Start page

240

End page

251

Peer reviewed

NON-REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
OPT  
Event nameEvent place
Photonics Europe

Strasbourg, France

Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/39657
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