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conference paper
Material Constants Extraction For Alscn Thin Films Using A Dual Mode Baw Resonator
2018
IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Dual mode bulk acoustic wave resonators were fabricated using tilted c-axis oriented grains. In this case, longitudinal and shear modes are excited at the same time. The stiffness matrix for the tilted geometry was derived, and served to determine c(33) and c(44) from the two basic resonance frequencies. In addition, it was possible to estimate the tilting angle from the ratio of the sound velocities.
Type
conference paper
Authors
Publication date
2018
Publisher
Published in
IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISBN of the book
978-1-5386-4782-0
Publisher place
New York
Start page
763
End page
766
Peer reviewed
REVIEWED
EPFL units
| Event name | Event place | Event date |
Belfast, NORTH IRELAND | Jan 21-25, 2018 | |
Available on Infoscience
November 8, 2018
Use this identifier to reference this record