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  4. Material Constants Extraction For Alscn Thin Films Using A Dual Mode Baw Resonator
 
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conference paper

Material Constants Extraction For Alscn Thin Films Using A Dual Mode Baw Resonator

Parsapour, Fazel  
•
Pashchenko, Vladimir  
•
Nicolay, Pascal
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2018
IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Dual mode bulk acoustic wave resonators were fabricated using tilted c-axis oriented grains. In this case, longitudinal and shear modes are excited at the same time. The stiffness matrix for the tilted geometry was derived, and served to determine c(33) and c(44) from the two basic resonance frequencies. In addition, it was possible to estimate the tilting angle from the ratio of the sound velocities.

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Type
conference paper
DOI
10.1109/MEMSYS.2018.8346667
Author(s)
Parsapour, Fazel  
•
Pashchenko, Vladimir  
•
Nicolay, Pascal
•
Muralt, Paul  
Date Issued

2018

Publisher

IEEE

Publisher place

New York

Published in
IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISBN of the book

978-1-5386-4782-0

Start page

763

End page

766

Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Event nameEvent placeEvent date
31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Belfast, NORTH IRELAND

Jan 21-25, 2018

Available on Infoscience
November 8, 2018
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/150550
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