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  4. Quantitative Analysis of Nanorough Hydrogenated Si(111) Surfaces through Vibrational Spectral Assignment by Periodic DFT Calculations br
 
research article

Quantitative Analysis of Nanorough Hydrogenated Si(111) Surfaces through Vibrational Spectral Assignment by Periodic DFT Calculations br

Holovsky, Jakub  
•
Sebera, Jakub
•
Sychrovsky, Vladimir
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May 19, 2022
Journal Of Physical Chemistry C

In this work, we use periodic density functional theory(periodic DFT) to rigorously assign vibrational spectra measured on nanorough wet-processed hydrogenated Si(111) surfaces. We compare Si(111)-(1x1) surfaces etched by dilute HF and NH4F, featuring two vibrational patterns that systematically appear together. They are attributed to vibrations observed on vicinal surfaces featuring 112??and 1??1??2 steps terminated with monohydrides and dihydrides, respectively. For the first time, we fully assign vibration patterns of realistic silicon surfaces with variable nanorough-ness directly by periodic DFT simulations involving contributions from isolated species but also contributions from highly coupled species forming standing waves. This work opens the path to a better quantitative characterization of imperfect and nanorough Si(111) surfaces from vibrational spectra.

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Type
research article
DOI
10.1021/acs.jpcc.1c09766
Web of Science ID

WOS:000804933700009

Author(s)
Holovsky, Jakub  
Sebera, Jakub
Sychrovsky, Vladimir
Zemen, Jan
De Wolf, Stefaan  
Ballif, Christophe  
Date Issued

2022-05-19

Publisher

AMER CHEMICAL SOC

Published in
Journal Of Physical Chemistry C
Volume

126

Issue

19

Start page

8278

End page

8286

Subjects

Chemistry, Physical

•

Nanoscience & Nanotechnology

•

Materials Science, Multidisciplinary

•

Chemistry

•

Science & Technology - Other Topics

•

Materials Science

•

h-terminated si(111)

•

dissolved-oxygen

•

infrared-spectroscopy

•

si(100) surfaces

•

etch hillocks

•

real-time

•

silicon

•

dependence

•

1st-principles

•

chemisorption

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
PV-LAB  
Available on Infoscience
July 4, 2022
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/188969
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