Loading...
research article
In-plane piezoelectric coefficient of PZT thin films as a function of composition
1999
The effective piezoelectric coefficient e(31) has been measured on sol-gel processed Pb(ZrxTi1-x)O-3 thin films with Zr concentrations ranging from 45 to 60%. The largest value was observed at 45% Zr, although dielectric constant and effective d(33) peak at 53% Zr. The findings suggest that the optimal composition for microactuators and sensors is less than or equal to 45% Zr, i.e., in the tetragonal part of the phase diagram.
Type
research article
Web of Science ID
WOS:000081792600031
Authors
Publication date
1999
Published in
Volume
224
Issue
1-4
Start page
663
End page
670
Note
Muralt, P Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland Swiss Fed Inst Technol, Lab Ceram, CH-1015 Lausanne, Switzerland
222NX
Cited References Count:18
Peer reviewed
REVIEWED
EPFL units
Available on Infoscience
August 21, 2006
Use this identifier to reference this record