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Fast driving technique for integrated thermal bimorph actuator toward high-throughput atomic-force microscopy
research article
Type
research article
Author(s)
Date Issued
2002
Published in
Volume
73
Issue
7
Start page
2643
End page
2646
Note
294
Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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