We show a scalable process to fabricate reusable silicon templates with funnel- and cone-shaped traps for the capillary-assisted particle assembly (CAPA) technique. The assembly yield of 100 nm AuNPs in funnel traps is as high as 94% and the median of the particle position offset is 10 nm. Assembled AuNPs are then transferred from the silicon template onto other substrates such as PDMS or OrmoComp with a transfer rate > 99%. After the first transfer process, the silicon template is reused leading to a particle position offset comparable to that of the first assembly.