conference paper
A 1.5-V Supplied, CMOS ASIC for the Actuation of an Electrostatic Micromotor
1996
MEMS'96 IEEE 9th Annual Internat. Workshop on Micro Electro Mechanical Systems
Type
conference paper
Author(s)
Date Issued
1996
Published in
MEMS'96 IEEE 9th Annual Internat. Workshop on Micro Electro Mechanical Systems
Start page
25
End page
31
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record