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conference paper
Microelectromechanical Metal-Air-Insulator-Semiconductor (MEM-MAIS) Diode: A Novel Hybrid Device for ESD Protection
2009
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
Type
conference paper
Authors
Publication date
2009
Publisher
Published in
2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems
Start page
132
End page
135
Peer reviewed
NON-REVIEWED
EPFL units
| Event name | Event place | Event date |
Sorrento, Italy | 25-29 01 2009 | |
Available on Infoscience
November 8, 2010
Use this identifier to reference this record