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research article
Comment on "Ion energy uniformity in high-frequency capacitive discharges" [Appl. Phys. Lett. 86, 021501 (2005)]
Type
research article
Web of Science ID
WOS:000231246000076
Authors
Publication date
2005
Published in
Volume
87
Issue
7
Article Number
076101
Peer reviewed
REVIEWED
Written at
EPFL
Available on Infoscience
April 16, 2008
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