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  4. Mid-infrared tunable Resonant Cavity Enhanced Detectors employing vertically moving comb drive actuated MEMS micromirrors
 
conference paper

Mid-infrared tunable Resonant Cavity Enhanced Detectors employing vertically moving comb drive actuated MEMS micromirrors

Quack, Niels  
•
Rust, Philipp
•
Blunier, Stefan
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2008
2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics
2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics
  • Details
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Type
conference paper
DOI
10.1109/OMEMS.2008.4607885
Author(s)
Quack, Niels  
Rust, Philipp
Blunier, Stefan
Dual, Jurg
Felder, Ferdinand
Arnold, Martin
Rahim, Mohamed
Fill, Matthias
Zogg, Hans
Date Issued

2008

Publisher

IEEE

Published in
2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics
Start page

174

End page

175

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
GR-QUA  
Event nameEvent placeEvent date
2008 IEEE/LEOS Internationall Conference on Optical MEMs and Nanophotonics

Freiburg, Germany

August, 11-14, 2008

Available on Infoscience
July 8, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/116123
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