research article
Microcolumn Based Low Energy E-Beam Writing
Stebler, C.
•
Despont, M.
•
Staufer, U.
Type
research article
Author(s)
Stebler, C.
Despont, M.
Staufer, U.
Date Issued
1996
Published in
Volume
30
Start page
45
End page
48
Note
150
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record