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conference paper
Optical microelectromechanical systems (OMEMS) based on silicon-on-insulator (SOI) technology
2002
Diffractive Optics and Micro-Optics
Type
conference paper
Authors
•
Clerc, P.-A.
•
Guldimann, B.
•
Schürmann, G.
•
Staufer, U.
•
•
•
Manzardo, O.
•
•
Marxer, C.
Publication date
2002
Publisher
Publisher place
Washington, DC, USA
Published in
Diffractive Optics and Micro-Optics
ISBN of the book
1-55752-710-5
Series title/Series vol.
2002 Technical Digest Series
Start page
114
End page
116
Peer reviewed
REVIEWED
Written at
OTHER
| Event name | Event place | Event date |
Tucson, Arizona, USA | 3–6 June 2002 | |
Available on Infoscience
April 22, 2009
Use this identifier to reference this record