conference paper
Fabrication of polysilicon gated-nanowires and their application for pA precision current measurements
2005
Digest of Technical Papers of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05)
Type
conference paper
Web of Science ID
WOS:000232189100210
Date Issued
2005
Published in
Digest of Technical Papers of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05)
Volume
1
Start page
859
End page
862
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
| Event name | Event place | Event date |
Seoul, Korea | June 5-9 | |
Available on Infoscience
December 6, 2005
Use this identifier to reference this record