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conference presentation
Pattern transfer and post processing of complex nanostructures formed by e-beam exposure in PMMA
2010
Type
conference presentation
Authors
Publication date
2010
EPFL units
| Event name | Event place | Event date |
Genova, Italy | September 19-22, 2010 | |
Available on Infoscience
November 8, 2010
Use this identifier to reference this record