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conference paper

Very Large Scale Arrays of Chemo-Mechanical Nano-Switches for Ultralow Power Hydrogen Sensing

Kiefer, Thomas 
•
Salette, Arnaud
•
Villanueva, Luis Guillermo 
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2010
23rd International IEEE Conference on Micro Electro Mechanical Systems MEMS'2010
23rd International IEEE Conference on Micro Electro Mechanical Systems MEMS'2010
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