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  4. Design and fabrication of micro-hotplates made on a polyimide foil: electrothermal simulation and characterization to achieve power consumption in the low mW range
 
research article

Design and fabrication of micro-hotplates made on a polyimide foil: electrothermal simulation and characterization to achieve power consumption in the low mW range

Courbat, J.  
•
Canonica, M.  
•
Teyssieux, D.
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2010
Journal of Micromechanics and Microengineering

The design of ultra-low power micro-hotplates on a polyimide (PI) substrate supported by thermal simulations and characterization is presented. By establishing a method for the thermal simulation of very small scale heating elements, the goal of this study was to decrease the power consumption of PI micro-hotplates to a few milliwatts to make them suitable for very low power applications. To this end, the mean heat transfer coefficients in air of the devices were extracted by finite element analysis combined with very precise thermographic measurements. A simulation model was implemented for these hotplates to investigate both the influence of their downscaling and the bulk micromachining of the polyimide substrate to lower their power consumptions. Simulations were in very good agreement with the experimental results. The main parameters influencing significantly the power consumption at such dimensions were identified and guidelines were defined allowing the design of very small (15 x 15 mu m) and ultra-low power heating elements (6 mW at 300 degrees C). These very low power heating structures enable the realization of flexible sensors, such as gas, flow or wind sensors, for applications in autonomous wireless sensors networks or RFID applications and make them compatible with large-scale production on foil such as roll-to-roll or printing processes.

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Type
research article
DOI
10.1088/0960-1317/21/1/015014
Web of Science ID

WOS:000285547800014

Author(s)
Courbat, J.  
•
Canonica, M.  
•
Teyssieux, D.
•
Briand, D.  
•
De Rooij, N. F.  
Date Issued

2010

Publisher

Institute of Physics

Published in
Journal of Micromechanics and Microengineering
Volume

21

Issue

1

Article Number

015014

Subjects

Gas Sensors

•

Silicon

•

Temperature

Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Available on Infoscience
January 13, 2011
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/62929
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