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conference paper
XY-stage for alignment of optical elements in MOEMS
1998
Microelectronic Structures and MEMS for Optical Processing IV
Type
conference paper
Authors
Publication date
1998
Published in
Microelectronic Structures and MEMS for Optical Processing IV
Series title/Series vol.
Proc. SPIE; 3513
Start page
202
End page
205
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record