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research article

Focused ion beam production of nanoelectrode arrays

Errachid, A.
•
Mills, C. A.
•
Pla-Roca, M.
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2008
Materials Science & Engineering C-Biomimetic and Supramolecular Systems

We present a method for the production of nanoelectrodes using focussed ion beam techniques (FIB). The electrodes utilise nanometric holes milled in a silicon nitride based pasivation layer, followed by wet etching of a silicon oxide based pasivation layer, to expose an underlying gold electrode. After functionalisation using a surface assembled monolayer and an electrochemically grown polypyrrole, these gold nanoelectrodes have been tested, via cyclic voltammetry, in the detection of Fe(CN)(6) ions. The nanoelectrodes will be used to investigate the electrical properties of nanometric biological specimen. (c) 2007 Elsevier B.V. All rights reserved.

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Type
research article
DOI
10.1016/j.msec.2007.10.077
Web of Science ID

WOS:000258076100036

Author(s)
Errachid, A.
•
Mills, C. A.
•
Pla-Roca, M.
•
Lopez, M. J.
•
Villanueva, G.  
•
Bausells, J.
•
Crespo, E.
•
Teixidor, F.
•
Samitier, J.
Date Issued

2008

Published in
Materials Science & Engineering C-Biomimetic and Supramolecular Systems
Volume

28

Issue

5-6

Start page

777

End page

780

Subjects

nanoelectrodes

•

focused ion beam

•

cyclic voltammetry

•

polypyrrole

•

neutral carrier

•

solid contact

•

microelectrodes

•

immobilization

Note

Errachid, A Univ Barcelona, Nanobioengn Res Lab IBEC, CIBER, C Marti I Franques 1, E-08028 Barcelona, Spain Univ Barcelona, Nanobioengn Res Lab IBEC, CIBER, E-08028 Barcelona, Spain Univ Barcelona, Dept Elect, CIBER, E-08028 Barcelona, Spain CSIC, IMB, Ctr Nacl Microelect, Bellaterra 08193, Spain ICMAB CSIC, Barcelona, Spain

Sp. Iss. SI

332IG

Cited References Count:18

Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
NEMS  
Available on Infoscience
August 6, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/93807
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