Loading...
research article
Global optimization of an encapsulated Si/SiO2L3 cavity with a 43 million quality factor
May 12, 2021
We optimize a silica-encapsulated silicon L3 photonic crystal cavity for ultra-high quality factor by means of a global optimization strategy, where the closest holes surrounding the cavity are varied to minimize out-of-plane losses. We find an optimal value of Qc=4.33×107, which is predicted to be in the 2 million regime in presence of structural imperfections compatible with state-of-the-art silicon fabrication tolerances.
Loading...
Name
s41598-021-89410-1.pdf
Type
Publisher's Version
Access type
openaccess
License Condition
CC BY
Size
1.61 MB
Format
Adobe PDF
Checksum (MD5)
58f4b418ffdaf4a86fdaf0fd33268b71