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  4. Assembly of Silicon Nitride Channels
 
conference poster not in proceedings

Assembly of Silicon Nitride Channels

Larsen, Tom  
•
Moreno, C. C.
•
Vazquez-Mena, O.
2017
Micro and Nano Engineering (MNE) 2017

Fabrication of silicon based micro-channels is typically a complex process involving multiple steps such as lithography, bonding, thin film deposition, etching, surface migration etc. We present a method for the fabrication of microchannels . insired by 2D material transferring techniques, we transfer a 100 nm thick silicon nitride film on top of a silicon nitride coated chip with predefined trenches and holes to form silicon nitride microchannels and membranes.

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2017_Tom_Larsen_MNE.pdf

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