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conference paper
Potential of dry etching for the fabrication of fused silica micro-optical elements
1999
Micromachine Technology for Diffractive and Holographic Optics
Type
conference paper
Authors
Publication date
1999
Published in
Micromachine Technology for Diffractive and Holographic Optics
Series title/Series vol.
Proc. SPIE; 3879
Start page
63
End page
70
Written at
OTHER
EPFL units
Available on Infoscience
April 22, 2009
Use this identifier to reference this record