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research article

Carbon nanotube vertical membranes for electrostatically actuated micro-electro-mechanical devices

Arun, A.
•
Acquaviva, D.  
•
Fernández-Bolaños, M.
Show more
2010
Microelectronic Engineering

In this work, we investigate vertically aligned carbon nanotube (CNT) membranes as building blocks to realize electrostatically actuated micro-electro-mechanical-systems (M EMS). The fabricated CNT dense arrays are grown on adjacent metal electrodes and can be actuated by applying a DC bias. The conductive membranes deflect when actuated and a clear pull-in is observed, as in any conventional MEM device using metal parallel plates. The Young's modulus of these membranes extracted from the pull-in voltage is in the range of 10s of MPa. S-parameter measurements for different actuation voltage shows a reduction in the insertion loss between the two electrodes with the increase in DC bias, indicating a change of the device capacitance. (C) 2009 Elsevier B.V. All rights reserved.

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Type
research article
DOI
10.1016/j.mee.2009.10.021
Web of Science ID

WOS:000276300700151

Author(s)
Arun, A.
•
Acquaviva, D.  
•
Fernández-Bolaños, M.
•
Salet, P.
•
Le-Poche, H.
•
Pantigny, P.
•
Idda, T.
•
Ionescu, A. M.  
Date Issued

2010

Publisher

Elsevier

Published in
Microelectronic Engineering
Volume

87

Issue

5-8

Start page

1281

End page

1283

Subjects

Carbon nanotube

•

Membrane

•

Vertically aligned

•

Capacitors

•

Mems

•

Nems

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Available on Infoscience
November 8, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/57234
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