doctoral thesis
Electromechanical Polysilicon Structres and Micromachining.
LINDER, Christian
1993
Type
doctoral thesis
Author(s)
LINDER, Christian
Advisors
Date Issued
1993
Publisher
Note
Jury: A. Shah, H. Baltès (ETHZ), W. Trimmer (Princeton Uni).
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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