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conference paper
A study of epitaxial piezoelectric thin films grown on silicon for energy scavenging applications
2008
PowerMEMS 2008
Type
conference paper
Author(s)
•
•
Gariglio, S.
•
Sambri, A.
•
Stucki, N.
•
Triscone, J.-M.
•
Guy, F.
•
Reiner, J. W.
•
Ahn, C. H.
•
Date Issued
2008
Journal
PowerMEMS 2008
Start page
269
End page
272
Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Event name | Event place | Event date |
Sendai | November 9-12, 2008 | |
Available on Infoscience
May 12, 2009
Use this identifier to reference this record