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conference paper
Silicon nanowires with lateral uniaxial tensile stress profiles for high electron mobility gate-all-around MOSFETs
2009
The 35th international conference on Micro Nano Engineering
Type
conference paper
Authors
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•
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Dobrosz, Peter
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Olsen, Sarah
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Publication date
2009
Published in
The 35th international conference on Micro Nano Engineering
Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
| Event name | Event place | Event date |
Ghent, Belgium | 28 Sep.-1 Oct. 2009 | |
Available on Infoscience
March 1, 2012
Use this identifier to reference this record