Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy
 
Loading...
Thumbnail Image
research article

Micromachined Silicon Cantilevers and Tips for Scanning Probe Microscopy

Buser, R.A.
•
Brugger, J.  
•
de Rooij, N.F.  
1991
Microelectronic Engineering

A monocrystalline silicon lever with an integrated silicon tip for a Force/Friction Microscope was realized. Theoretical studies have been carried out to find the shape and dimensioning according to the mechanical system requirements. Moreover, sharp tips with a high aspect ratio could be demonstrated.

  • Files
  • Details
  • Metrics
Loading...
Thumbnail Image
Name

Buser_1991_MicroEng.pdf

Access type

openaccess

Size

189.07 KB

Format

Adobe PDF

Checksum (MD5)

e5724b7cb11d2c8297c99e23318f03fc

Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés