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conference paper
MEMS Fabrication based on Epitaxial Piezoelectric Thin Films on Silicon
2008
Cimtec 2008
Type
conference paper
Author(s)
Gariglio, S.
•
Stucki, N.
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Triscone, J.-M.
•
•
•
•
Baek, S.-H.
•
Reiner, J. W.
•
Ahn, C. H.
Date Issued
2008
Published in
Cimtec 2008
Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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