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Towards better scanning near-field optical microscopy probes - progress and new developments
research article
Several approaches are described with the aim of producing near-field optical probes with improved properties. Focused ion beam milling allows the fabrication of small apertures in a controlled fashion, resulting in probes with excellent polarization properties and increased transmission. Microfabrication processes are described that allow the production of apertures of 30-50 nm, facilitating the mass-fabrication of apertured tip structures that can be used in a combined force/near-field optical microscope. Finally, possible future developments are outlined.
Type
research article
Author(s)
Heinzelmann, H.
•
Freyland, J. M.
•
Eckert, R.
•
Huser, Th.
•
Schürmann, G.
•
•
Staufer, U.
•
Date Issued
1999
Published in
Volume
194
Issue
2
Start page
365
End page
368
Note
223
Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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