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research article

High-Q AlN/SiO2 Symmetric Composite Thin Film Bulk Acoustic Wave Resonators

Artieda, A.
•
Muralt, P. 
2008
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control
Type
research article
DOI
10.1109/TUFFC.953
Web of Science ID

WOS:000260873900013

Authors
Artieda, A.
•
Muralt, P. 
Publication date

2008

Published in
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control
Volume

55

Issue

11

Start page

2463

End page

2468

Peer reviewed

REVIEWED

EPFL units
LC 
Available on Infoscience
November 4, 2008
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/30644