Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Full-field hard x-ray microscopy below 30 nm: a challenging nanofabrication achievement
 
research article

Full-field hard x-ray microscopy below 30 nm: a challenging nanofabrication achievement

Chen, Yu-Tung
•
Lo, Tsung-Nan
•
Chu, Yong S.
Show more
2008
Nanotechnology

The fabrication of devices to focus hard x-rays is one of the most difficult-and important-challenges in nanotechnology. Here we show that Fresnel zone plates combining 30 nm external zones and a high aspect ratio finally bring hard x-ray microscopy beyond the 30 nm Rayleigh spatial resolution level and measurable spatial frequencies down to 20-23 nm feature size. After presenting the overall nanofabrication process and the characterization test results, we discuss the potential research impact of these resolution levels.

  • Details
  • Metrics
Type
research article
DOI
10.1088/0957-4484/19/39/395302
Web of Science ID

WOS:000258538800009

Author(s)
Chen, Yu-Tung
Lo, Tsung-Nan
Chu, Yong S.
Yi, Jaemock
Liu, Chi-Jen
Wang, Jun-Yue
Wang, Cheng-Liang
Chiu, Chen-Wei
Hua, Tzu-En
Hwu, Yeukuang
Show more
Date Issued

2008

Publisher

Institute of Physics

Published in
Nanotechnology
Volume

19

Issue

39

Article Number

395302

Subjects

E-Beam Lithography

•

Zone Plates

•

Fabrication

•

Resolution

•

CIBM-PC

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LPRX  
CIBM  
Available on Infoscience
November 30, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/61102
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés