doctoral thesis
Multilayer surface micromachining: microresonators & microrelays.
GRETILLAT, Marc-Alexis
1997
Type
doctoral thesis
Author(s)
GRETILLAT, Marc-Alexis
Advisors
Date Issued
1997
Publisher
Note
Jury: H.P. Herzig (IMT-UniNE), S.D. Senturia (MIT, Cambridge USA), Ph. D. Harrie et A.C. Tilmans (CPCLARE Corp. Hasselt, B).
EPFL units
Available on Infoscience
May 12, 2009
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