research article
Raman spectroscopy of sputtered AlN films: E-2(high) biaxial strain dependence
Type
research article
Web of Science ID
WOS:000239690800036
Author(s)
Date Issued
2006
Published in
Volume
89
Issue
6
Article Number
061905
Note
061905
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
October 18, 2007
Use this identifier to reference this record