Epitaxy and characterization of Si1-x-yGexCy alloy layers grown on (100) Si by rapid thermal chemical vapor deposition

doctoral thesis

Mi, Jian

1995

Name

EPFL_TH1424.pdf

Access type

restricted

Size

6.81 MB

Format

Adobe PDF

Checksum (MD5)

44e16201dab72df0d8641b11573e207b